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2020 : Release of 1/2-inch SXGA InGaAs-Si- stacked visible and short-wavelength infrared light image sensors (Sony)

Sony released a small (1/2-inch) image sensor capable of imaging visible and short-wavelength infrared light (wavelength: 0.4-1.7μm) in May 2020. A back-illuminated InGaAs photodiode array chip (1280x1024 pixels, 5μm pitch) was stacked on a Si CMOS readout circuit chip. The electrodes between the chips were connected by Cu-Cu direct bonding.

Schematic of the cross-sectional structure

SWIR image sensor (IMX990)

Example of imaging